Measurement of in-plane elastic constants of crystalline solid films by X-ray diffraction coupled with four-point bending

Surface and Coatings Technology

Volumn 200, Issue 12-13, 2006, Pages 4006-4010

  Yu, Yong He ^a,c   Lai, M O ^a   Lu, L ^a   Zheng, G Y ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b Singapore Technologies Aerospace   (Singapore)

^c PSB Corporation   (Singapore)

Author keywords

Bending; Elastic properties; Solid films; X ray diffraction

Indexed keywords

BENDING STRENGTH; ELASTIC MODULI; FILMS; NONDESTRUCTIVE EXAMINATION; POISSON RATIO; SOLIDS; STRESS ANALYSIS; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINE SOLID FILMS; ELASTIC PROPERTIES; FOUR-POINT BENDING;

CRYSTALLINE MATERIALS;

BENDING STRENGTH; CRYSTALLINE MATERIALS; ELASTIC MODULI; FILMS; NONDESTRUCTIVE EXAMINATION; POISSON RATIO; SOLIDS; STRESS ANALYSIS; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

EID: 32844467594     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.01.094     Document Type: Article

References (16)

1. W.D. Nix Metall. Trans. A 20 1989 2217
2. B. Bharat X. Li Int. Mater. Rev. 48 3 2003 125
3. K.R. Virwani A.P. Malshe W.F. Schmidt D.K. Sood Smart Mater. Struct. 12 2003 1028
4. A.J. Kalkman A.H. Verbruggen G.C.A.M. Janssen Appl. Phys. Lett. 78 18 2001 2673
5. M. Zhang J. He Surf. Coat. Technol. 142-144 2001 125
6. G. Cornella S.H. Lee W.D. Nix J.C. Bravman Appl. Phys. Lett. 70 20 1997 2949
7. P. Villain P.-O. Renault Ph. Goudeau K.F. Badawi Thin Solid Films 406 2002 185
8. P.-O. Renault K.F. Badawi L. Bimbault Ph. Goudeau Appl. Phys. Lett. 73 14 1998 1952
9. X. Jin C.O. Kim Y.P. Lee J. Vac. Sci. Technol., A 20 3 2002 612
10. O.B. Loopstra E.R. van Snek T.H. De Keijser E.J. Mittemeijer Phys. Rev., B 44 13 1991 519
11. J.F. Jongste O.B. Loopstra G.C.A.M. Janssen S. Radellaar J. Appl. Phys. 73 1993 2816
12. U. Laudahn S. Fahler H.U. Krebs A. Pundt Appl. Phys. Lett. 74 5 1999 647
13. K.F. Badawi P. Villain Ph. Goudeau P.-O. Renault Appl. Phys. Lett. 80 25 2002 4705
14. P.-O. Renault E. Le Bourhis P. Villain Ph. Goudeau K.F. Badawi D. Faurie Appl. Phys. Lett. 83 3 2003 473
15. S.P. Timoshenko J.N. Goodier Theory of plasticity 3rd ed. 1969 McGraw-Hill New York
16. I.C. Noyan J.B. Cohen Residual Stresses Measurement Method by Diffraction and Interpretation Spriner-Verlag 1987