Langmuir probe measurements in inductively coupled CF4 plasmas

Surface and Coatings Technology

Volumn 200, Issue 12-13, 2006, Pages 3963-3968

  Huang, S ^a   Ning, Z Y ^a   Xin, Y ^a   Di, X L ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

Electron temperature; Inductively coupled plasmas; Langmuir probe

Indexed keywords

CARRIER CONCENTRATION; ELECTRONS; HEATING; PLASMA COLLISION PROCESSES; PLASMA PROBES; THERMODYNAMIC PROPERTIES;

COLLISIONLESS HEATING MECHANISM; ELECTRON TEMPERATURE; LANGMUIR PROBE; LOW-PRESSURE INDUCTIVELY COUPLED PLASMAS; MEAN ELECTRON TEMPERATURE; THERMODYNAMIC EQUILIBRIUM;

INDUCTIVELY COUPLED PLASMA;

CARRIER CONCENTRATION; ELECTRONS; HEATING; INDUCTIVELY COUPLED PLASMA; PLASMA COLLISION PROCESSES; PLASMA PROBES; THERMODYNAMIC PROPERTIES;

EID: 32644488905     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.04.006     Document Type: Article

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