GaN MSM photodetectors with photo-CVD annealed Ni/Au electrodes

Microelectronics Journal

Volumn 37, Issue 4, 2006, Pages 328-331

  Jhou, Y D ^a   Chen, C H ^b   Chang, S J ^a   Su, Y K ^a   Chang, P C ^c   Chen, P C ^c   Hung, H ^a   Yu, C L ^a   Wang, S M ^a   Wu, M H ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHENG SHIU UNIVERSITY   (Taiwan)

^c NAN JEON INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

GaN; MSM; Ni Au; Photo CVD; Schottky diode

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; ELECTRODES; GALLIUM NITRIDE; GOLD; NICKEL;

MSM; PHOTO-CVD;

PHOTODETECTORS;

EID: 32644438978     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.05.020     Document Type: Article

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