Compositional and structural characterization of indium nitride using swift ions

Journal of Crystal Growth

Volumn 288, Issue 2, 2006, Pages 236-240

  Timmers, Heiko ^a   Butcher, K Scott A ^b   Shrestha, Santosh K ^a   Chen, Patrick P T ^b   Wintrebert Fouquet, Marie ^b   Dogra, Rakesh ^c  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b MACQUARIE UNIVERSITY   (Australia)

^c AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

A1. Characterization; A1. Composition; A1. Ion beam analysis; A1. Irradiation; B1. Indium nitride; B2. Semiconductor III V

Indexed keywords

COMPOSITION; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; HEAVY IONS; ION BEAMS; ION IMPLANTATION; NITROGEN; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR MATERIALS;

SEMICONDUCTOR III-IV; STRUCTURAL CHARACTERIZATION; SWIFT IONS;

THIN FILMS;

EID: 32644432560     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.12.004     Document Type: Article

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