Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry

Journal of Computational Physics

Volumn 198, Issue 2, 2004, Pages 617-627

  Al Mohssen, Husain A ^a   Hadjiconstantinou, Nicolas G ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BALLISTICS; MONTE CARLO METHODS; NAVIER STOKES EQUATIONS; NUMERICAL METHODS; SURFACE CHEMISTRY;

CHEMICAL VAPOUR DEPOSITION; CHEMISTRY MODELS; DEPOSITION MODELING; DIRECT SIMULATION MONTE CARLO; DIRECT SIMULATION MONTE CARLO METHOD; GASEOUS PHASIS; KNUDSEN; NAVIER STOKES; NONLINEAR SURFACE; PHASE TRANSPORT;

CHEMICAL VAPOR DEPOSITION;

EID: 3242885665     PISSN: 00219991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcp.2004.01.018     Document Type: Article

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