Study on the deposition profile characteristics in the micron- scale trench using direct simulation monte carlo method

Journal of Fluids Engineering, Transactions of the ASME

Volumn 120, Issue 2, 1998, Pages 296-302

  Ikegawa, Masato ^a   Kobayashi, Jun’ichi ^a   Maruko, Morihisa ^b  

^a HITACHI LTD   (Japan)

^b Hiroshima Women's Commercial College   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; MONTE CARLO METHODS; SPUTTER DEPOSITION;

MICRON SCALE TRENCHES;

CHANNEL FLOW;

EID: 0032097775     PISSN: 00982202     EISSN: 1528901X     Source Type: Journal    
DOI: 10.1115/1.2820648     Document Type: Article

References (11)

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