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Volumn 22, Issue 3, 2004, Pages 1174-1178

Composite thin films of (ZrO2)x-(Al2O 3)1-x for high transmittance attenuated phase shifting mask in ArF optical lithography

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MATERIALS; MASKS; PHASE SHIFT; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SUPERLATTICES; VOLUME FRACTION; ZIRCONIA;

EID: 3242686201     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (9)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.