Evaluation of the attenuated PSM performance as the shifter transmittance and illumination systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3748, Issue , 1999, Pages 332-339

  Kim, Yong Hoon ^a   Park, Jo Hyun ^a   Park, Jin Hong ^a   Lee, Kyung Hee ^a   Choi, Song Woon ^a   Yoon, Hee Sun ^a   Sohn, Jung Min ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; LIGHT TRANSMISSION; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

ATTENUATION PHASE-SHIFTING MASKS (ATTPSM); OPTICAL PROXIMITY EFFECT CORRECTION (OPC); RESOLUTION ENHANCEMENT TECHNOLOGY (RET);

MASKS;

EID: 0032645538     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.360214     Document Type: Conference Paper

References (3)