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Volumn 5946, Issue , 2005, Pages 1-10

Optical properties of crystalline Al2O3 thin films grown by atomic layer deposition

Author keywords

Aluminum oxide; Atomic layer deposition; Extinction coefficient; Photoluminescence; Refractive index; Structural properties

Indexed keywords

ALUMINUM COMPOUNDS; AMORPHOUS FILMS; CRYSTALLINE MATERIALS; PHOTOLUMINESCENCE; REFRACTIVE INDEX; SURFACE ROUGHNESS;

EID: 32244434048     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.639047     Document Type: Conference Paper
Times cited : (13)

References (27)
  • 1
    • 0027680602 scopus 로고
    • Optimized design of an antireflection coating for textured silicon solar cell
    • S.-C. Chiao, J.-L. Zhou, and H. A. Macleod, "Optimized design of an antireflection coating for textured silicon solar cell", Appl. Opt. 32, pp. 5557-5560, 1993.
    • (1993) Appl. Opt. , vol.32 , pp. 5557-5560
    • Chiao, S.-C.1    Zhou, J.-L.2    Macleod, H.A.3
  • 2
    • 0028545962 scopus 로고
    • Effect of overcoat layer on highly reflective coating for high-average-power lasers
    • S. Motokoshi, H. Yoshida, K. Yoshida, T. Yamanaka, and S. Nakai, "Effect of overcoat layer on highly reflective coating for high-average-power lasers", Jpn. J. Appl. Phys. 33, pp. L1530-L1533, 1994.
    • (1994) Jpn. J. Appl. Phys. , vol.33
    • Motokoshi, S.1    Yoshida, H.2    Yoshida, K.3    Yamanaka, T.4    Nakai, S.5
  • 3
    • 0036317473 scopus 로고    scopus 로고
    • Large-area optical coatings with uniform thickness grown by surface chemical reactions for high-power laser applications
    • S. Zaitsu, S. Motokoshi, T. Jitsuno, M. Nakatsuka, and T. Yamanaka, "Large-area optical coatings with uniform thickness grown by surface chemical reactions for high-power laser applications", Jpn. J. Appl. Phys. 41, pp. 160-165, 2002.
    • (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 160-165
    • Zaitsu, S.1    Motokoshi, S.2    Jitsuno, T.3    Nakatsuka, M.4    Yamanaka, T.5
  • 5
    • 0037197337 scopus 로고    scopus 로고
    • Fabrication and characterisation of aluminium oxide/chromium oxide superlattice for attenuated phase-shifting mask working at 193 nm wavelength
    • F. D. Lai and L. A. Wang, "Fabrication and characterisation of aluminium oxide/chromium oxide superlattice for attenuated phase-shifting mask working at 193 nm wavelength", Thin Solid Films 409, pp. 220-226, 2002.
    • (2002) Thin Solid Films , vol.409 , pp. 220-226
    • Lai, F.D.1    Wang, L.A.2
  • 12
    • 0026204631 scopus 로고
    • Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processes
    • L. Hiltunen, H. Kattelus, M. Leskelä, L. Niinistö, E. Nykänen, P. Soininen, and M. Tiitta, "Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processes", Mater. Chem. Phys. 28, pp. 379-388, 1991.
    • (1991) Mater. Chem. Phys. , vol.28 , pp. 379-388
    • Hiltunen, L.1    Kattelus, H.2    Leskelä, M.3    Niinistö, L.4    Nykänen, E.5    Soininen, P.6    Tiitta, M.7
  • 16
    • 0020830645 scopus 로고
    • Determination of optical constants of thin film coating materials based on inverse synthesis
    • J. A. Dobrowolski, F. C. Ho, and A. Waldorf, "Determination of optical constants of thin film coating materials based on inverse synthesis", Appl. Opt. 22, pp. 3191-3200, 1983.
    • (1983) Appl. Opt. , vol.22 , pp. 3191-3200
    • Dobrowolski, J.A.1    Ho, F.C.2    Waldorf, A.3
  • 18
    • 0001697707 scopus 로고
    • Status-report on luminescence investigations with synchrotron radiation at HASYLAB
    • G. Zimmerer, "Status-report on luminescence investigations with synchrotron radiation at HASYLAB" Nucl. Instr. Methods A 308, pp. 178-186, 1991.
    • (1991) Nucl. Instr. Methods A , vol.308 , pp. 178-186
    • Zimmerer, G.1
  • 26
    • 0028758871 scopus 로고
    • In situ characterization of ALE growth by reagent pulse delay times in a flow-type reactor
    • J. Aarik, A. Aidla, and K. Kukli, "In situ characterization of ALE growth by reagent pulse delay times in a flow-type reactor" Appl. Surf. Sci. 75, pp. 180-184, 1994.
    • (1994) Appl. Surf. Sci. , vol.75 , pp. 180-184
    • Aarik, J.1    Aidla, A.2    Kukli, K.3
  • 27
    • 0036679797 scopus 로고    scopus 로고
    • Size dependence of the luminescence spectra of nanocrystal alumina
    • Z. Q. Yu, C. Li, and N. Zhang," Size dependence of the luminescence spectra of nanocrystal alumina", J. Lumin. 99, pp. 29-34, 2002.
    • (2002) J. Lumin. , vol.99 , pp. 29-34
    • Yu, Z.Q.1    Li, C.2    Zhang, N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.