Ultra-thin aluminum oxide as a thermal oxidation barrier on metal films

Thin Solid Films

Volumn 415, Issue 1-2, 2002, Pages 219-223

  Gan, L ^a,c   Gomez, R D ^a   Castillo, A ^b   Chen, P J ^b   Powell, C J ^b   Egelhoff Jr , W F ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c Building 222 ^*  (United States)

Author keywords

Protective barrier; Thermal oxidation; Ultra thin metal films

Indexed keywords

ALUMINA; ANNEALING; ELECTRIC RESISTANCE; THERMOOXIDATION; THIN FILMS;

ULTRA-THIN METAL FILMS;

METALLIC FILMS;

EID: 0036669974     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00622-3     Document Type: Article

References (20)