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Volumn 44, Issue 37-41, 2005, Pages

Mechanical characteristics of diamond-like-carbon nanosprings fabricated by focused-ion-beam chemical vapor deposition

Author keywords

Chemical vapor deposition; Diamond like carbon; Focused ion beam; Mechanical characteristics; Nanospring

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; ION BEAMS; OPTICAL MICROSCOPY;

DIAMOND-LIKE-CARBON; FOCUSED-ION-BEAM; MECHANICAL CHARACTERISTICS; NANOSPRING;

NANOSTRUCTURED MATERIALS;

EID: 32044466743 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.44.L1228 Document Type: Article

Times cited : (9)

References (10)

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