Thermal donor formation processes in silicon and the catalytic role of hydrogen

Applied Physics Letters

Volumn 88, Issue 5, 2006, Pages 1-3

  Tsetseris, L ^a   Wang, Sanwu ^a   Pantelides, S T ^a,b  

^a VANDERBILT UNIVERSITY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OXYGEN CLUSTERS; TD-H COMPLEXES; THERMAL DONOR FORMATION; THERMAL DONORS;

ACTIVATION ENERGY; CATALYSIS; DIFFUSION; DISSOCIATION; HYDROGEN; OXYGEN;

SILICON;

EID: 31944436456     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2168680     Document Type: Article

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