SCOPUS 정보 검색 플랫폼

Proceedings - Electrochemical Society

Volumn PV 2005-09, Issue , 2005, Pages 523-530

LPCVD synthesis of silicon nanodots from silane and for flash memory devices

(6) Cocheteau, V a Caussat, B a Mur, P b Scheid, E c Donnadieu, P d Billon, T b

a LABORATOIRE DE GÉNIE CHIMIQUE (France)

b CEA LETI (France)

c LAAS CNRS (France)

d UNIV GRENOBLE ALPES (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL FLUID DYNAMICS; FLASH MEMORY; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SILANES; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

ELLIPSOMETRY MEASUREMENTS; NANOMETER SCALE; SILICON NANOCRYSTALS;

SEMICONDUCTING SILICON;

EID: 31744445775 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (2)

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