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Volumn 44, Issue 9 A, 2005, Pages 6421-6424

Germanium oxide layers used for forward transfer of electrical circuits to foreign plastic substrates

b TRADIM (Japan)

Author keywords

Germanium oxide; Thin film circuits; Transfer method

Indexed keywords

AMORPHOUS SILICON; ARGON; ETCHING; NETWORKS (CIRCUITS); SPUTTERING; THIN FILMS;

GERMANIUM OXIDE; THIN-FILM CIRCUITS; TRANSFER METHOD;

SEMICONDUCTING GERMANIUM COMPOUNDS;

EID: 31644442760 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.44.6421 Document Type: Article

Times cited : (10)

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