Laser beam application to thin film transistors

Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 352-358

  Sameshima, T ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CRYSTAL GROWTH; CRYSTALLINE MATERIALS; CRYSTALLIZATION; EXCIMER LASERS; INTERFACES (MATERIALS); IRRADIATION; LASER ABLATION; LASER BEAMS; SEMICONDUCTING SILICON; SOLIDIFICATION;

RAPID LASER HEATING METHOD; SILICON FILMS; XENON CHLORIDE EXCIMER LASER IRRADIATION;

THIN FILM TRANSISTORS;

EID: 0030563037     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00443-2     Document Type: Article

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