Defect reduction and surface passivation of SiO2/Si by heat treatment with high-pressure H2O vapor

Applied Physics A: Materials Science and Processing

Volumn 69, Issue 2, 1999, Pages 221-224

  Sameshima, T ^a   Sakamoto, K ^a   Asada, K ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; CHEMICAL BONDS; DEPOSITION; EVAPORATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; HIGH PRESSURE EFFECTS; PASSIVATION; SILICA; SILICON;

DEFECT REDUCTION; ELECTRON MINORITY CARRIERS; HIGH PRESSURE WATER VAPOR;

INTERFACES (MATERIALS);

EID: 0032593256     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050993     Document Type: Article

References (15)

1. S.J. Pertron, J.W. Corbett, T.S. Shi: Appl. Phys. A 43, 153 (1987)
2. H. Nagayoshi, Y. Onozawa, M. Ikeda, M. Yamaguchi, Y. Yamamoto. T. Uematsu, T. Saitoh, K. Kamisako: Jpn. J. Appl. Phys. 35, L1047 (1996)
3. H.E. Elgamel, A. Rohatgi, Z. Chen, C. Vinckier, J. Nijs, R. Mertens: In Proc. 1st World Conference on Photovoltaic Energy Conversion (IEEE, Salem 1994) p. 1323
4. Z. Chen, S.K. Pang, K. Yasukake, A. Rohatigi: J. Appl. Phys. 74, 2856 (1993)
5. A.G. Aberle, T. Lauinger, J. Schmidt, R. Hezel: J. Appl. Phys. Lett. 66. 2828 (1995)
6. C. Leguijt, P. Loelgen, J.A. Eickelboom, A.S.H. van der Heide, R.A. Steeman, W.C. Sinke, P.M. Sarrp, L.A. Verhoef, P.-P. Michiels. Z.H. Chen, A. Rohatgi: In Proc. 12th Europ. Photovolt. Solar Energy Conf. (Stephens, Bedford, UK 1994) p. 720
7. T. Sameshima, M. Satoh: Jpn. J. Appl. Phys. 36, L687 (1997)
8. T. Sameshima, K. Sakamoto, M. Satoh: Thin Solid Films 335, 138 (1998)
9. T. Sameshima, A. Kohno, M. Sekiya, M. Hara, N. Sano: Appl. Phys. Lett. 64, 1018 (1994)
10. J.M. Borrego, R.J. Gutmann, N. Jensen, O. Paz: Solid State Electron. 30, 195 (1987)
11. G.S. Kousik, Z.G. Ling, P.K. Ajmera: J. App. Phys. 72, 141 (1992)
12. T.S. Horanyi, T. Pavelka, P. Tuettoe: Appl. Surf. Sci. 63, 306 (1993)
13. T. Sameshima, K. Sakamoto, Y. Tsunoda, T. Saitoh: Jpn. J. Appl. Phys. 37, L1452 (1998)
14. K. Yasutake, Z. Chen, S.K. Pang, A. Rohatgi: J. Appl. Phys. 75, 2048 (1994)
15. G. Langguth, T. Sameshima, J.H. Werner: In Proc. 13th European Photovoltaic Solar Energy Conf (Information Press, Oxfordshire 1994) p. 1530