Low temperature poly-Si TFT-LCD by excimer laser anneal

Thin Solid Films

Volumn 383, Issue 1-2, 2001, Pages 19-24

  Uchikoga, Shuichi ^a   Ibaraki, Nobuki ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EXCIMER LASERS; GLASS; LOW TEMPERATURE PROPERTIES; SEMICONDUCTING SILICON; THIN FILM TRANSISTORS;

EXCIMER LASER ANNEAL (ELA);

LIQUID CRYSTAL DISPLAYS;

EID: 0035247803     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01644-8     Document Type: Article

References (17)

1. T. Higuchi, J. Hanari, N. Nakamura, K. Mametsuka, M. Watanabe, T. Murai, R. Watanabe, M. Seiki, Azuma, Y. Hori, K. Nakamura, Y. Aoki, H. Sakurai, T. Nakazono, N. Harada, SID 00 Digest (in press).
2. Hanazawa Y., Hirai H., Kumagai K., Goshoo K., Nakamura N. Euro Display. 99:1999;369.
3. N. Ibaraki, SID 99 Digest (1999) 172.
4. Y. Aoki, T. Iizuka, S. Sagi, M. Kurube, T. Tsunashima, S. Ishizawa, K. Ando, H. Sakurai, T. Ejiri, T. Nakazono, M. Kobayashi, H. Sato, N. Ibaraki, M. Sakai, N. Harada, SID 99 Digest (1999) 176.
5. Ha Y.M., Kim B.K., Yeo J.C., Kim K.J., Kim J.S., Yoon Y.S., Park J.D., Soh H.S. Euro Display. 99:1999;369.
6. Lee S.W., Chung H.J., Han C.H. Euro Display. 99:1999;465.
7. J.R. Ayres, S.D. Brotherton, C.A. Fisher, D.J. McCulloch, IDW '98 (1998) 127.
8. Harrer T., Maresch S., Merkle T., Lueder E., Stehle M., Zahorski D., Prat C. Euro Display. 99:1999;57.
9. Matsumura M. Euro Display. 99:1999;351.
10. Crowder M.A., Carey P.G., Smith P.M., Sposili R.S., Cho H.S., Im J.S. IEEE. Electron. Dev. Lett. 19:(8 ):1998;306.
11. S. Higashi, AM-LCD'99 (1999) 225.
12. M. Goto, M. Sakai, M. Shibuya, M. Nishitani, AM-LCD'99 (1999) 143.
13. J. Tanaka, H. Saito, T. Yoshizawa, T.O. Kamoto, T. Yamauchi, Y. Nishimura, AM-LCD'99 (1999) 261.
14. M. Yamamoto, H. Nishitani, M. Sakai, M. Gotoh, Y. Taketomi, H. Tsutsu, M. Nishitani, Euro Display 99 (1999) 53.
15. A. Mimura, Y. Shinagawa, G. Kawachi, K. Onisawa, T. Minemura, M. Hara, T. Ishida, T. Takeda, AM-LCD '99 (1999) 287.
16. Mishima Y., Takei M., Ogata K., Uematsu T., Yoshino K., Takeuchi F., Sakai N. Euro Display. 99:1999;49.
17. K. Suzuki, M. Tada, Y. Yamaji, Y. Ishizuka, AM-LCD '98 (1998) 5.