Fabrication of PZT thin films by liquid delivery MOCVD with conventional multi-sources and a novel cocktail source

Ferroelectrics

Volumn 293, Issue , 2003, Pages 69-88

  Shiosaki, Tadashi ^a   Okamura, Soichiro ^a   Miyake, Masato ^a   Otani, Yohei ^a   Abe, Norikazu ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Cocktail source; Liquid delivery; MOCVD; PbPtx; PZT; Thin film

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLIZATION; IRON COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; POLARIZATION; REMANENCE;

CRYSTALLINITY; REACTOR PRESSURE; REMANENT POLARIZATION; SUBSTRATE TEMPERATURE;

FERROELECTRIC THIN FILMS;

EID: 31544470485     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190390238234     Document Type: Conference Paper

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