Superior electrochemical performance of CNx nanotubes using TiSi2 buffer layer on Si substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 87-90

  Fang, Wei Chuan ^a   Huang, Jin Hua ^a   Sun, Chia Liang ^b   Chen, Li Chyong ^b   Papakonstantinou, P ^c   Chen, Kuei Hsien ^d  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c UNIVERSITY OF ULSTER   (United Kingdom)

^d INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CARBON INORGANIC COMPOUNDS; CATALYSTS; ELECTROCHEMISTRY; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ELECTROCHEMICAL PERFORMANCE; NANOMETER; SILICON SUBSTRATES;

CARBON NANOTUBES;

EID: 31544449749     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2141627     Document Type: Article

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