Surface roughness characterization of soft x-ray multilayer films on the nanometer scale

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 42-47

  Yu, J ^a,b   Cao, J L ^b   Namba, Y ^a   Ma, Y Y ^b  

^a CHUBU UNIVERSITY   (Japan)

^b CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038330599     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588488     Document Type: Article

References (11)

1. N. M. Ceglio, D. P. Gaines, J. E. Trebes, R. A. London, and D. G. Stearns, Appl. Opt. 27, 5022 (1988); N. M. Ceglio, D. P. Gaines, D. G. Stearns, and A M. Hawryluk, Opt. Commun. 69, 285 (1989).
2. N. M. Ceglio, D. P. Gaines, J. E. Trebes, R. A. London, and D. G. Stearns, Appl. Opt. 27, 5022 (1988); N. M. Ceglio, D. P. Gaines, D. G. Stearns, and A M. Hawryluk, Opt. Commun. 69, 285 (1989).
3. Sh. T. Chunyu et al. Sci. China (Ser. A) 35, 1509 (1992).
4. M. Green, M. Richter, J. Kortright, T. W. Barbee, R. Carr, and I. Lindau, J Vac. Sci. Technol. A 6, 428 (1988).
5. K. Nakajima, S. Aoki, T. Koyano, E. Kita, and S. Fujiwara, Jpn. J. Appl. Phys. 28, L854 (1989).
6. J. Garnaes, F. E. Christensen, F. Besenbacher, E. Laegsgaard, and I. Stensgaard, Opt. Eng. 29, 666 (1990).
7. D. L. Windt, W. K. Waskiewicz, and J. E. Griffith, Appl. Opt. 33, 2025 (1994).
8. H. E. Bennett and J. O. Porteus, J. Opt. Soc. Am. 51, 123 (1961).
9. J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, DC, 1989).
10. U. Durig, IBM J. Res. Devel. 38, 347 (1994).
11. Talystep step height measuring instrument, Talydata Computer, and Nanosurf-type profiler manufactured by Rank Taylor Hobson Limited, P.O. Box 36, Leicester LE47JQ, England.