Closed-form formulation for sensitivity of capacitive ultrasonic transducers using V-grooved backplates

Sensors and Actuators, A: Physical

Volumn 69, Issue 2, 1998, Pages 139-142

  Hietanen, Jarmo ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

Airborne ultrasonics; Capacitive ultrasonic transducer

Indexed keywords

CAPACITORS; ELECTRIC EXCITATION; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; RESONATORS;

AIRBORNE ULTRASONICS; V GROOVED RESONATORS;

ULTRASONIC TRANSDUCERS;

EID: 0042545200     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00082-X     Document Type: Article

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