Novel silicon nitride micromachined wide bandwidth ultrasonic transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1998, Pages 1081-1084

  Noble, R A ^a   Bozeat, R J ^a   Robertson, T J ^a   Billson, D R ^a   Hutchins, D A ^a  

^a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; MICROMACHINING; SILICON NITRIDE; SILICON SENSORS;

MICROMACHINED ULTRASONIC TRANSDUCERS (MUT);

ULTRASONIC TRANSDUCERS;

EID: 0032277354     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)