Mechanical behavior of an electrostatically actuated microplate

Proceedings of the ASME Design Engineering Technical Conference

Volumn 5 C, Issue , 2003, Pages 1875-1882

  Zhao, Xiaopeng ^a   Abdel Rahman, Eihab M ^a   Nayfeh, Ali H ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BIOTECHNOLOGY; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; GALERKIN METHODS; NATURAL FREQUENCIES; PARTIAL DIFFERENTIAL EQUATIONS; PROBLEM SOLVING;

ELECTROSTATIC FORCES; MICROPLATES;

PLATES (STRUCTURAL COMPONENTS);

EID: 1842683959     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2003/vib-48531     Document Type: Conference Paper

References (12)

1. Zengerle, R., Richter, A., and Sandmaier, H., 1992, "A Micro Membrane Pump with Electrostatic Actuation", Micro Electro Mechanical Systems Conference, Travemunde, Germany.
2. Scheeper, P.R., van der Donk, A.G.H., and Bergveld, P., 1999, "A Review of Silicon Microphones", Sensors and Actuators A, Vol. 44, pp. 1-11.
3. Tilmans, H.A. and Legtenberg, R., 1994, "Electrostatically Driven Vacuum-encapsulated Polysilicon Resonators: Part II. Theory and Performance", Sensors and Actuators A, Vol. 45, pp. 67-84.
4. Zhang, X.M., Chau, F.S., Quan, C., Lam, Y.L., and Liu, A.Q., 2001, "A Study of the Static Characteristics of a Torsional Micromirror", Sensors and Actuators A, Vol. 90, pp. 73-81.
5. Jiang, T.Y., Ng, T.Y., and Lam, K.Y., 2000, "Dynamic Analysis of an Electrostatic Micropump", International Conference on Modeling and Simulation of Microsystems, San Diego, CA.
6. Hsu, P.C., Mastrangelo, C.H., and Wise, K.D., 1998, "A High Sensitivity Polysilicon Diaphragm Condenser Microphone", MEMS Conference, Heidelberg, Germany.
7. Francais, O. and Dufour, I., 1999, "Normalized Abacus for the Global Behavior of Diaphragms: pneumatic, Electrostatic, Piezoelectric or electromagnetic Actuation", Journal of Modeling and Simulation of Microsystems, Vol. 2, pp. 149-160.
8. Timoshenko, S.P. and Woinowsky-Krieger S., 1959, Theory of Plates and Shells, McGraw-Hill, New York.
9. Nayfeh, A.H. and Mook, D.T., 1979, Nonlinear Oscillations, Wiley, New York.
10. Younis, M. I., Abdel-Rahman, E. M., and Nayfeh, A. H., "A Reduced-Order Model for Electrically Actuated Microbeam-Based MEMS," to appear in the IEEE Journal of Microelectromechanical Systems.
11. Abdel-Rahman, E.M., Younis, M.I., and Nayfeh, A.H., 2002, "Characterization of the Mechanical Behavior of an Electrostatically Actuated Microbeam", Journal of Micromechanics and Microengineering, Vol. 12, pp. 759-766.
12. Levy, S., 1942, "Bending of Rectangular Plates with Large Deflections", NACA Report.