SCOPUS 정보 검색 플랫폼

Sensors and Actuators: A. Physical

Volumn 44, Issue 1, 1994, Pages 1-11

A review of silicon microphones

(4) Scheeper, P R a van der Donk, A G H b Olthuis, W c Bergveld, P c

a Bruel & Kjaer Danmark (Denmark)

b TEXAS INSTRUMENTS (United States)

c UNIVERSITY OF TWENTE (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; CAPACITANCE; DIAPHRAGMS; FIELD EFFECT TRANSISTORS; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; MICROMACHINING; SENSORS; SILICON SENSORS; SPURIOUS SIGNAL NOISE;

CORRUGATED DIAPHRAGMS; SILICON MICROPHONES;

MICROPHONES;

EID: 0028468394 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(94)00790-X Document Type: Review

Times cited : (314)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.