Physical structure of molecular-beam epitaxy growth defects in HgCdTe and their impact on two-color detector performance

Journal of Electronic Materials

Volumn 33, Issue 6, 2004, Pages 662-666

  Buell, A A ^a   Pham, L T ^a   Newton, M D ^a   Venzor, G M ^a   Norton, E M ^a   Smith, E P ^a   Varesi, J B ^a   Harper, V B ^a   Johnson, S M ^a   Coussa, R A ^a   de Lyon, T ^b   Roth, J A ^b   Jensen, J E ^b  

^a RAYTHEON COMPANY   (United States)

^b Hughes Aircraft Co   (United States)

Author keywords

Growth defects; HgCdTe; Molecular beam epitaxy (MBE); Two color detector

Indexed keywords

DRY ETCHING; ENERGY DISPERSIVE SPECTROSCOPY; LIQUID PHASE EPITAXY; MERCURY COMPOUNDS; MOLECULAR BEAM EPITAXY; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DIODES; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

FOCAL PLANE ARRAYS (FPA); MID-WAVELENGTH INFRARED (MWIR); VOID NUCLEATION; WET CHEMICAL ETCHING;

CRYSTAL DEFECTS;

EID: 3142587175     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-004-0064-3     Document Type: Conference Paper

References (13)

1. J.A. Wilson et al., Proc. SPIE 2274, 117 (1994).
2. E. Smith et al., Proc. SPIE 5209, 1 (2003).
3. W. Mason and J.R. Waterman, Appl. Phys. Lett. 74, 1633 (1999).
4. P. Ferret, J.P. Zanatta, R. Hamelin, S. Cremer, A. Million, M. Wolny, and G. Destefanis, J. Electron. Mater. 29, 641 (2000).
5. R.D. Rajavel, D.M. Jamba, O.K. Wu, J.E. Jensen, J.A. Wilson, E.A. Patten, K. Kosai, P. Goetz, G.R. Chapman, and W.A. Radford, J. Cryst. Growth 157/176, 653 (1997).
6. T. Aoki and D. J. Smith, Appl. Phys. Lett. 82, 2275 (2003).
7. L.H. Zhang and C.J. Summers, J. Electron. Mater. 27, 634 (1998).
8. M. Sandian, J.M. Arias, J. Bajaj, J.G. Pasko, L.O. Bubulac, and R.E. Dewames, J. Electron. Mater. 24, 1207 (1995).
9. T. Aoki, Y. Chang, G. Badano, J. Zhao, C. Grein, S. Sivananthan, and D.J. Smith, J. Electron. Mater. 32, 703 (2003).
10. D. Chandra, F. Aqariden, J. Frazier, S. Gutzier, T. Orent, and H.D. Shih, J. Electron. Mater. 29, 887 (2000).
11. J.B. Varesi, A.A. Buell, J.M. Peterson, R.E. Bornfreund, M.F. Vilela, WA. Radford, and S.M. Johnson, J. Electron. Mater. 32, 661 (2003).
12. S.M. Johnson, D.R. Rhiger, J.P. Rosebeck, J.M. Peterson, S.M. Taylor, and M.E. Boyd, J. Vac. Sci. Technol. B 10, 1499 (1992).
13. C.E. Ass, private communication.