Growth of nanocrystalline silicon thin film with layer-by-layer technique for fast photo-detecting applications

Materials Science and Engineering: B

Volumn 127, Issue 2-3, 2006, Pages 251-254

  Lin, Chun Yu ^a   Fang, Yean Kuen ^a   Chen, Shih Fang ^a   Lin, Ping Chang ^a   Lin, Chun Sheng ^a   Chou, Tse Heng ^a   Hwang, Jenn Shyong ^a   Lin, Kuang I ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Absorption coefficient; Hall mobility; Micro Raman scattering; Nanocrystalline silicon (nc Si); Photo detecting

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM GROWTH; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY; SILICON; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ABSORPTION COEFFICIENT; MICRO-RAMAN SCATTERING; NANOCRYSTALLINE CILICON (NC-SI); PHOTO-DETECTING;

NANOSTRUCTURED MATERIALS;

EID: 31344464730     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2005.10.007     Document Type: Article

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