Preparation of palladium film by coating photolysis process using KrF or ArF excimer laser

Applied Surface Science

Volumn 252, Issue 8, 2006, Pages 2858-2866

  Imai, Yoji ^a   Tsunoda, Tatsuo ^a   Kobayashi, Kiyoshi ^a   Watanabe, Akio ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

ArF laser; Coating photolysis process; KrF laser; Pd; Pd acetate

Indexed keywords

COATINGS; IRRADIATION; LASERS; PALLADIUM; PHOTOLYSIS;

ARF LASERS; KRF LASERS; PD ACETATE;

METALLIC FILMS;

EID: 31344457825     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.04.045     Document Type: Article

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