Fabrication of thin metallic membranes by MOCVD and sputtering

Journal of Membrane Science

Volumn 133, Issue 2, 1997, Pages 217-230

  Xomeritakis, George ^a   Lin, Y S ^a  

^a University of Cincinnati   (United States)

Author keywords

Chemical vapor deposition; Gas separations; Magnetron sputtering; Metallic membranes

Indexed keywords

ARGON; CERAMIC MATERIALS; HELIUM; HYDROGEN; MAGNETRON SPUTTERING; MECHANICAL PERMEABILITY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PALLADIUM ALLOYS; PERMSELECTIVE MEMBRANES; POROUS MATERIALS; THERMAL EFFECTS; TRANSPORT PROPERTIES;

METALLIC MEMBRANES;

GAS PERMEABLE MEMBRANES;

ALUMINUM OXIDE; ARGON; HELIUM; HYDROGEN; PALLADIUM; SILVER;

ARTICLE; ARTIFICIAL MEMBRANE; CERAMICS; GAS TRANSPORT; MEMBRANE PERMEABILITY; MEMBRANE TRANSPORT; PRIORITY JOURNAL; TEMPERATURE DEPENDENCE;

EID: 0031258863     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0376-7388(97)00084-7     Document Type: Article

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