Palladium Thin Films Grown by CVD from (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Palladium(II)

Chemical Vapor Deposition

Volumn 3, Issue 2, 1997, Pages 85-90

  Bhaskaran, Vijay ^a   Hampden Smith, Mark J ^b   Kodas, Toivo T ^a  

^a University of New Mexico   (United States)

^b UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; HYDROGEN; REACTION KINETICS; THICKNESS MEASUREMENT; THIN FILMS;

TRENCH FILL PROCESS;

PALLADIUM;

EID: 0031099437     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.19970030206     Document Type: Article

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