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Volumn 42, Issue 2, 2006, Pages 118-120

Post-breakdown oxide voltage oscillation in thin SiO2 under nano-scaled repetitive ramped voltage stress

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ELECTRON TRAPS; NANOTECHNOLOGY; SILICA;

EID: 31344456641     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20063577     Document Type: Article
Times cited : (6)

References (10)
  • 1
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    • O'Shea, S.J.: et al. ' Conducting atomic force microscopy study of silicon dioxide breakdown ', J. Vac. Sci. Technol., 1995, B13, (5), p. 1945-1952
    • (1995) J. Vac. Sci. Technol. , vol.13 , Issue.5 , pp. 1945-1952
    • O'Shea, S.J.1
  • 2
    • 0000843992 scopus 로고    scopus 로고
    • Localized degradation studies of ultrathin gate oxide
    • Wen, H.J., and Ludeke, R.: ' Localized degradation studies of ultrathin gate oxide ', J. Vac. Sci. Technol., 1998, A16, (3), p. 1735-1740
    • (1998) J. Vac. Sci. Technol. , vol.16 , Issue.3 , pp. 1735-1740
    • Wen, H.J.1    Ludeke, R.2
  • 3
    • 0001088886 scopus 로고    scopus 로고
    • Dielectric breakdown of silicon oxide studied by scanning probe microscopy
    • Yasue, T.: et al. ' Dielectric breakdown of silicon oxide studied by scanning probe microscopy ', J. Vac. Sci. Technol., 1997, B15, (6), p. 1884-1888
    • (1997) J. Vac. Sci. Technol. , vol.15 , Issue.6 , pp. 1884-1888
    • Yasue, T.1
  • 5
    • 33845450358 scopus 로고    scopus 로고
    • 2 films at a nanometer scale using a conductive atomic force microscope
    • 2 films at a nanometer scale using a conductive atomic force microscope ', J. Appl. Phys., 2002, 91, (4), p. 2071-2079
    • (2002) J. Appl. Phys. , vol.91 , Issue.4 , pp. 2071-2079
    • Porti, M.1    Nafría, M.2    Aymerich, X.3
  • 7
    • 0035948145 scopus 로고    scopus 로고
    • 2 films using conducting atomic force microscopy
    • 2 films using conducting atomic force microscopy ', Appl. Phys. Lett., 2001, 78, (26), p. 4181-4183
    • (2001) Appl. Phys. Lett. , vol.78 , Issue.26 , pp. 4181-4183
    • Porti, M.1
  • 8
    • 0036685471 scopus 로고    scopus 로고
    • Micro breakdown in small-area ultrathin gate oxides
    • Cellere, G.: et al. ' Micro breakdown in small-area ultrathin gate oxides ', IEEE Trans. Electron Devices, 2002, 49, (8), p. 1367-1374
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.8 , pp. 1367-1374
    • Cellere, G.1
  • 9
    • 0001431712 scopus 로고    scopus 로고
    • Modeling of stress-induced leakage current in ultrathin oxides with the trap-assisted tunneling mechanism
    • Chou, A.I.: et al. ' Modeling of stress-induced leakage current in ultrathin oxides with the trap-assisted tunneling mechanism ', Appl. Phys. Lett., 1997, 70, (25), p. 3407-3409
    • (1997) Appl. Phys. Lett. , vol.70 , Issue.25 , pp. 3407-3409
    • Chou, A.I.1
  • 10
    • 0033080327 scopus 로고    scopus 로고
    • A new I-V model for stress-induced leakage current including inelastic tunneling
    • Takagi, S., Yasuda, N., and Toriumi, A.: ' A new I-V model for stress-induced leakage current including inelastic tunneling ', IEEE Trans. Electron Devices, 1999, 46, (2), p. 348-354
    • (1999) IEEE Trans. Electron Devices , vol.46 , Issue.2 , pp. 348-354
    • Takagi, S.1    Yasuda, N.2    Toriumi, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.