Modeling and analysis of RF MEMS filters

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 233-239

  Motiee, Mehrnaz ^a   Khajepour, Amir ^a   Mansour, Raafat R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELASTIC MODULI; EQUIVALENT CIRCUITS; FREQUENCIES; INSERTION LOSSES; MICROMACHINING; OPTIMIZATION; POLYSILICON; RESONATORS;

ELLIPTIC RESPONSES; FREQUENCY FILTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 1942455791     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-41568     Document Type: Conference Paper

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7. rd Edition, 2001.
8. Clark T.-C. Nguyen, "Micromechanical Components for Miniaturized Low-Power Communication," proceeding of IEEE MTT-S 1999, pp. 48-77.
9. Anatol I. Zverev, "Handbook of Filter Synthesis," John Wiley and Sons, Inc., New York, 1958