Amorphous transparent conductive oxide films of In2 O 3 -ZnO with additional Al2 O3 impurities

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 3, 2005, Pages 401-407

  Tominaga, K ^a   Fukumoto, H ^a   Kondou, K ^a   Hayashi, Y ^a   Murai, K ^a   Moriga, T ^a   Nakabayashi, I ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CARRIER CONCENTRATION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; IMPURITIES; INDIUM COMPOUNDS; OPTICAL PROPERTIES; THIN FILMS; ZINC OXIDE;

CARRIER GENERATION MECHANISM; OPTICAL BAND-GAP ENERGY;

AMORPHOUS FILMS;

EID: 31044438559     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1874172     Document Type: Article

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