Film properties of ZnO:AI prepared by cosputtering of ZnO:Al and either Zn or Al targets

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1074-1079

  Tominaga, Kikuo ^a   Manabe, Haruhiko ^a   Umezu, Norio ^a   Mori, Ichiro ^a   Ushiro, Tomoko ^a   Nakabayashi, Ichiro ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844287678     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580432     Document Type: Article

References (7)

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