메뉴 건너뛰기




Volumn 116, Issue 7, 1996, Pages 256-267

Historical Perspective of Accelerometer Technologies

Author keywords

[No Author keywords available]

Indexed keywords


EID: 85010175133     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.116.256     Document Type: Article
Times cited : (4)

References (33)
  • 1
    • 0018753978 scopus 로고
    • A Batch-Fabricated Silicon Accelerometer
    • Lynn Michelle Roylance, James B. Angell, “A Batch-Fabricated Silicon Accelerometer”, IEEE Tran. Elec. Dev, 1979, pp. 1911-1917.
    • (1979) IEEE Tran. Elec. Dev , pp. 1911-1917
    • Roylance, L.M.1    Angell, J.B.2
  • 2
    • 84894019926 scopus 로고
    • Accelerometer design based on attenuated total reflection
    • Bo-Shen Zhu, Mette Owner-Petersen and Torben Licht, “Accelerometer design based on attenuated total reflection”, Applied Optics, Vol.27, No.14, 1988, pp. 2972-2975.
    • (1988) Applied Optics , vol.27 , Issue.14 , pp. 2972-2975
    • Zhu, B.-S.1    Owner-Petersen, M.2    Licht, T.3
  • 3
    • 85010149477 scopus 로고
    • The detection and measurement of infra-red radiation
    • Smith, F. E. Jones and R. P. Chasmar, “The detection and measurement of infra-red radiation”, Oxford University Press 1968.
    • (1968) Oxford University Press
    • Smith, F.E.J.1    Chasmar, R.P.2
  • 4
    • 0030102033 scopus 로고    scopus 로고
    • Opto-mechanical ac-celerometer based on strain sensing by a Bragg grating in a planar waveguide
    • Torben Storgaard-Larsen, et al, “Opto-mechanical ac-celerometer based on strain sensing by a Bragg grating in a planar waveguide”, Sensors and Actuators, A52, 1996, pp. 25-32.
    • (1996) Sensors and Actuators , vol.A52 , pp. 25-32
    • Storgaard-Larsen, T.1
  • 6
    • 0026400570 scopus 로고
    • Vibration Rectification in Silicon Mi-cromachined Accelerometers
    • San Francisco
    • L. A. Christel, et al. “Vibration Rectification in Silicon Mi-cromachined Accelerometers”, transducer '91, San Francisco 1991, pp. 88-92.
    • (1991) transducer '91 , pp. 88-92
    • Christel, L.A.1
  • 7
    • 0027888160 scopus 로고
    • Piezoresistive accelerometer with overload protection and low cross-sensitivity
    • H. Crazzolara, G. Flach and W. von Munch, “Piezoresistive accelerometer with overload protection and low cross-sensitivity”, Sensors and Actuators A, 1993, pp. 201-207.
    • (1993) Sensors and Actuators A , pp. 201-207
    • Crazzolara, H.1    Flach, G.2    von Munch, W.3
  • 8
    • 85010149455 scopus 로고
    • Self-Testable Accelerometer Microsystem
    • Sprinegr, Berlin
    • S. C. Terry, et al. “Self-Testable Accelerometer Microsystem”, Micro System technologies 90, Sprinegr, Berlin, 1990, pp. 611-616.
    • (1990) Micro System technologies 90 , pp. 611-616
    • Terry, S.C.1
  • 9
    • 85010149450 scopus 로고
    • Mikromechanik“
    • Springer Verlag
    • Anton Heuberger, “Mikromechanik“, Springer Verlag, 1989, pp. 366-380.
    • (1989) , pp. 366-380
    • Heuberger, A.1
  • 10
    • 0029755546 scopus 로고    scopus 로고
    • A Wide frequency range, Rugged Silicon micro Accelerometer with Overrange stops
    • James T. Suminto, Endevco, “A Wide frequency range, Rugged Silicon micro Accelerometer with Overrange stops”, IEEE MEMS96, 1996, pp. 180-185.
    • (1996) IEEE MEMS96 , pp. 180-185
    • Suminto, J.1    Endevco2
  • 11
    • 0024141314 scopus 로고
    • A Monolithic Silicon Accelerometer with integral air damping and overrange shock protection
    • P. W. Barth, et al, “A Monolithic Silicon Accelerometer with integral air damping and overrange shock protection”, Tech. Dig., IEEE Solid State Sensor and Actuator, Hilton Head 1988, pp. 35-38.
    • (1988) Tech. Dig., IEEE Solid State Sensor and Actuator, Hilton Head , pp. 35-38
    • Barth, P.W.1
  • 12
    • 0024769604 scopus 로고
    • Accelerometer Systems with Self-Testable Features
    • H. VAllen, et al. “Accelerometer Systems with Self-Testable Features”, Sensors and Actuators, Vol.20, 1989, pp. 153-161.
    • (1989) Sensors and Actuators , vol.20 , pp. 153-161
    • VAllen, H.1
  • 13
    • 85010124903 scopus 로고
    • Simulation, Design and Characterization of a Silicon Piezoresistive Accelerometer, Fabricated by a Bipolar-Compatible Industrial Process
    • Thomas Tschan, “Simulation, Design and Characterization of a Silicon Piezoresistive Accelerometer, Fabricated by a Bipolar-Compatible Industrial Process”, PhD Dissertation, University of Neuchatel, 1991.
    • (1991) PhD Dissertation, University of Neuchatel
    • Tschan, T.1
  • 15
    • 0019926888 scopus 로고
    • Integrated Silicon Microbeam PI-FET Accelerometer
    • P. L. Chen, et al. “Integrated Silicon Microbeam PI-FET Accelerometer”, IEEE Trans. Electron Devices, Vol. FD-29, 1982, pp. 27-33.
    • (1982) IEEE Trans. Electron Devices , vol.FD-29 , pp. 27-33
    • Chen, P.L.1
  • 16
    • 0030091410 scopus 로고    scopus 로고
    • A piezoelectric triaxial accelerometer
    • Patrick Sheeper, et al., “A piezoelectric triaxial accelerometer”, J. Micromech. Microeng. 6 (1996) pp. 131-133.
    • (1996) J. Micromech. Microeng. , vol.6 , pp. 131-133
    • Sheeper, P.1
  • 17
    • 85010124924 scopus 로고
    • Ultrasonic technologi
    • Berlincourt, “Ultrasonic technologi”, Plenum Press 1971, pp. 63-124.
    • (1971) Plenum Press , pp. 63-124
    • Berlincourt1
  • 18
    • 0003014764 scopus 로고
    • Flexure mode piezoelectric transducers
    • C. P. Germano, “Flexure mode piezoelectric transducers”, IEEE Trans, on Audio and Electroacoustics, Vol. AU-19, No.1, 1971, pp. 6-12.
    • (1971) IEEE Trans, on Audio and Electroacoustics , vol.AU-19 , Issue.1 , pp. 6-12
    • Germano, C.P.1
  • 19
    • 0029488152 scopus 로고    scopus 로고
    • An In-ertial Grade Micromachined Vibrating Beam Accelerometer
    • Terry V. Roszhart, Hal Jerman, et al, I. C. Sensors, “An In-ertial Grade Micromachined Vibrating Beam Accelerometer”, Transducers '95, Vol.2, pp. 656-659.
    • Transducers '95 , vol.2 , pp. 656-659
    • Roszhart, T.1    Jerman, H.2    Sensors, I.C.3
  • 20
    • 85010168780 scopus 로고    scopus 로고
    • Sensor foundries and Production of sensors at Sensor AS.
    • H. Jakobsen, “Sensor foundries and Production of sensors at Sensor AS.”, Technical Digest, MME '95
    • Technical Digest, MME '95
    • Jakobsen, H.1
  • 21
    • 0346025999 scopus 로고    scopus 로고
    • Datasheet for SA30 Crash Sensor
    • Horten, Norway
    • SensoNor A. S., Horten, Norway, “Datasheet for SA30 Crash Sensor”.
    • SensoNor, A.S.1
  • 22
    • 0029487515 scopus 로고    scopus 로고
    • Resonant Microbeam Accelerometers
    • Honeywell Tech
    • D. W. Burns, et al, Honeywell Tech, “Resonant Microbeam Accelerometers”, Transducers '95, Vol.2, pp. 659-662.
    • Transducers '95 , vol.2 , pp. 659-662
    • Burns, D.W.1
  • 23
    • 0028526888 scopus 로고
    • A surface micromachined silicon accelerometer with on-chip detection circuitry
    • Wolfgang Kuehnel and Steven Sherman, “A surface micromachined silicon accelerometer with on-chip detection circuitry”, Sensors and Actuators A45, 1994, pp. 7-16.
    • (1994) Sensors and Actuators A45 , pp. 7-16
    • Kuehnel, W.1    Sherman, S.2
  • 24
    • 0025698131 scopus 로고
    • Precision Accelerometers with µg Resolution
    • CSEM
    • F. Rudolf, et al, CSEM, “Precision Accelerometers with µg Resolution”, Sensors and Actuators A 21-23, 1990, pp. 297-302.
    • (1990) Sensors and Actuators A 21-23 , pp. 297-302
    • Rudolf, F.1
  • 25
    • 0025698106 scopus 로고
    • An ASIC for High-resolution Capacitive Microaccelerometers
    • CSEM
    • H. Leuthold and F. Rudolf, CSEM, “An ASIC for High-resolution Capacitive Microaccelerometers”, Sensors and Actuators A 21-23, 1990, pp. 278-281.
    • (1990) Sensors and Actuators A 21-23 , pp. 278-281
    • Leuthold, H.1    Rudolf, F.2
  • 26
    • 84902194684 scopus 로고
    • Wide dynamic range direct digital accelerometer
    • W. Henrion, Hal Jerman, et al, I. C. Sensors. “Wide dynamic range direct digital accelerometer”, IEEE Hilton Head 1990, pp. 153-157.
    • (1990) IEEE Hilton Head , pp. 153-157
    • Henrion, W.1    Jerman, H.2    Sensors, I.C.3
  • 27
    • 0012817046 scopus 로고
    • Design and test of a precision servoaccelerometer with digital output”
    • CSEM
    • Y. de Coulon, et al, CSEM, “Design and test of a precision servoaccelerometer with digital output” 7th Solid State Sensors and Actuators, 1993, pp. 832-835.
    • (1993) 7th Solid State Sensors and Actuators , pp. 832-835
    • de Coulon, Y.1
  • 28
    • 0025698079 scopus 로고    scopus 로고
    • Semiconductor Capacitance-type Accelerometer with PWM Electrostatic Servo technique
    • A
    • S. Suzuki and S. Tuchitani, “Semiconductor Capacitance-type Accelerometer with PWM Electrostatic Servo technique” Sensors and Actuators, Vol. A 21-23, 1999, pp. 316-319.
    • (1999) Sensors and Actuators , vol.21-23 , pp. 316-319
    • Suzuki, S.1    Tuchitani, S.2
  • 29
    • 0024732784 scopus 로고
    • An electron tunneling sensor
    • Waltman and W. J. Kaiser, “An electron tunneling sensor” Sensors and Actuators, vol. 19, 1989, 201-210.
    • (1989) Sensors and Actuators , vol.19 , pp. 201-210
    • Waltman1    Kaiser, W.J.2
  • 30
    • 0028514999 scopus 로고
    • Wide-Bandwith Electromechanical Actuators for Tunneling Displacement Transducers
    • September
    • T. W. Kenny, et al. “Wide-Bandwith Electromechanical Actuators for Tunneling Displacement Transducers” J. Microelectromechanical Systems, Vol.3, No.3, September 1994, pp. 97-104.
    • (1994) J. Microelectromechanical Systems , vol.3 , Issue.3 , pp. 97-104
    • Kenny, T.W.1
  • 31
    • 0029490521 scopus 로고    scopus 로고
    • A Miniature, High-Sensitive Electron Tunneling Accelerometer
    • Howard K. Rockstadt, T. W. Kenny, et al. “A Miniature, High-Sensitive, Electron Tunneling Accelerometer” Transducers '95, Vol.2, pp. 675-678.
    • Transducers '95 , vol.2 , pp. 675-678
    • Rockstadt, H.1    Kenny, T.W.2
  • 32
    • 85010172930 scopus 로고    scopus 로고
    • Progress in tunnel Sensors
    • J. Grade, et al. “Progress in tunnel Sensors” Preprint Hilton Head 1996.
    • (1996) Preprint Hilton Head
    • Grade, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.