-
1
-
-
0018753978
-
A Batch-Fabricated Silicon Accelerometer
-
Lynn Michelle Roylance, James B. Angell, “A Batch-Fabricated Silicon Accelerometer”, IEEE Tran. Elec. Dev, 1979, pp. 1911-1917.
-
(1979)
IEEE Tran. Elec. Dev
, pp. 1911-1917
-
-
Roylance, L.M.1
Angell, J.B.2
-
2
-
-
84894019926
-
Accelerometer design based on attenuated total reflection
-
Bo-Shen Zhu, Mette Owner-Petersen and Torben Licht, “Accelerometer design based on attenuated total reflection”, Applied Optics, Vol.27, No.14, 1988, pp. 2972-2975.
-
(1988)
Applied Optics
, vol.27
, Issue.14
, pp. 2972-2975
-
-
Zhu, B.-S.1
Owner-Petersen, M.2
Licht, T.3
-
4
-
-
0030102033
-
Opto-mechanical ac-celerometer based on strain sensing by a Bragg grating in a planar waveguide
-
Torben Storgaard-Larsen, et al, “Opto-mechanical ac-celerometer based on strain sensing by a Bragg grating in a planar waveguide”, Sensors and Actuators, A52, 1996, pp. 25-32.
-
(1996)
Sensors and Actuators
, vol.A52
, pp. 25-32
-
-
Storgaard-Larsen, T.1
-
6
-
-
0026400570
-
Vibration Rectification in Silicon Mi-cromachined Accelerometers
-
San Francisco
-
L. A. Christel, et al. “Vibration Rectification in Silicon Mi-cromachined Accelerometers”, transducer '91, San Francisco 1991, pp. 88-92.
-
(1991)
transducer '91
, pp. 88-92
-
-
Christel, L.A.1
-
7
-
-
0027888160
-
Piezoresistive accelerometer with overload protection and low cross-sensitivity
-
H. Crazzolara, G. Flach and W. von Munch, “Piezoresistive accelerometer with overload protection and low cross-sensitivity”, Sensors and Actuators A, 1993, pp. 201-207.
-
(1993)
Sensors and Actuators A
, pp. 201-207
-
-
Crazzolara, H.1
Flach, G.2
von Munch, W.3
-
8
-
-
85010149455
-
Self-Testable Accelerometer Microsystem
-
Sprinegr, Berlin
-
S. C. Terry, et al. “Self-Testable Accelerometer Microsystem”, Micro System technologies 90, Sprinegr, Berlin, 1990, pp. 611-616.
-
(1990)
Micro System technologies 90
, pp. 611-616
-
-
Terry, S.C.1
-
9
-
-
85010149450
-
Mikromechanik“
-
Springer Verlag
-
Anton Heuberger, “Mikromechanik“, Springer Verlag, 1989, pp. 366-380.
-
(1989)
, pp. 366-380
-
-
Heuberger, A.1
-
10
-
-
0029755546
-
A Wide frequency range, Rugged Silicon micro Accelerometer with Overrange stops
-
James T. Suminto, Endevco, “A Wide frequency range, Rugged Silicon micro Accelerometer with Overrange stops”, IEEE MEMS96, 1996, pp. 180-185.
-
(1996)
IEEE MEMS96
, pp. 180-185
-
-
Suminto, J.1
Endevco2
-
11
-
-
0024141314
-
A Monolithic Silicon Accelerometer with integral air damping and overrange shock protection
-
P. W. Barth, et al, “A Monolithic Silicon Accelerometer with integral air damping and overrange shock protection”, Tech. Dig., IEEE Solid State Sensor and Actuator, Hilton Head 1988, pp. 35-38.
-
(1988)
Tech. Dig., IEEE Solid State Sensor and Actuator, Hilton Head
, pp. 35-38
-
-
Barth, P.W.1
-
12
-
-
0024769604
-
Accelerometer Systems with Self-Testable Features
-
H. VAllen, et al. “Accelerometer Systems with Self-Testable Features”, Sensors and Actuators, Vol.20, 1989, pp. 153-161.
-
(1989)
Sensors and Actuators
, vol.20
, pp. 153-161
-
-
VAllen, H.1
-
13
-
-
85010124903
-
Simulation, Design and Characterization of a Silicon Piezoresistive Accelerometer, Fabricated by a Bipolar-Compatible Industrial Process
-
Thomas Tschan, “Simulation, Design and Characterization of a Silicon Piezoresistive Accelerometer, Fabricated by a Bipolar-Compatible Industrial Process”, PhD Dissertation, University of Neuchatel, 1991.
-
(1991)
PhD Dissertation, University of Neuchatel
-
-
Tschan, T.1
-
15
-
-
0019926888
-
Integrated Silicon Microbeam PI-FET Accelerometer
-
P. L. Chen, et al. “Integrated Silicon Microbeam PI-FET Accelerometer”, IEEE Trans. Electron Devices, Vol. FD-29, 1982, pp. 27-33.
-
(1982)
IEEE Trans. Electron Devices
, vol.FD-29
, pp. 27-33
-
-
Chen, P.L.1
-
16
-
-
0030091410
-
A piezoelectric triaxial accelerometer
-
Patrick Sheeper, et al., “A piezoelectric triaxial accelerometer”, J. Micromech. Microeng. 6 (1996) pp. 131-133.
-
(1996)
J. Micromech. Microeng.
, vol.6
, pp. 131-133
-
-
Sheeper, P.1
-
17
-
-
85010124924
-
Ultrasonic technologi
-
Berlincourt, “Ultrasonic technologi”, Plenum Press 1971, pp. 63-124.
-
(1971)
Plenum Press
, pp. 63-124
-
-
Berlincourt1
-
18
-
-
0003014764
-
Flexure mode piezoelectric transducers
-
C. P. Germano, “Flexure mode piezoelectric transducers”, IEEE Trans, on Audio and Electroacoustics, Vol. AU-19, No.1, 1971, pp. 6-12.
-
(1971)
IEEE Trans, on Audio and Electroacoustics
, vol.AU-19
, Issue.1
, pp. 6-12
-
-
Germano, C.P.1
-
19
-
-
0029488152
-
An In-ertial Grade Micromachined Vibrating Beam Accelerometer
-
Terry V. Roszhart, Hal Jerman, et al, I. C. Sensors, “An In-ertial Grade Micromachined Vibrating Beam Accelerometer”, Transducers '95, Vol.2, pp. 656-659.
-
Transducers '95
, vol.2
, pp. 656-659
-
-
Roszhart, T.1
Jerman, H.2
Sensors, I.C.3
-
20
-
-
85010168780
-
Sensor foundries and Production of sensors at Sensor AS.
-
H. Jakobsen, “Sensor foundries and Production of sensors at Sensor AS.”, Technical Digest, MME '95
-
Technical Digest, MME '95
-
-
Jakobsen, H.1
-
21
-
-
0346025999
-
Datasheet for SA30 Crash Sensor
-
Horten, Norway
-
SensoNor A. S., Horten, Norway, “Datasheet for SA30 Crash Sensor”.
-
-
-
SensoNor, A.S.1
-
22
-
-
0029487515
-
Resonant Microbeam Accelerometers
-
Honeywell Tech
-
D. W. Burns, et al, Honeywell Tech, “Resonant Microbeam Accelerometers”, Transducers '95, Vol.2, pp. 659-662.
-
Transducers '95
, vol.2
, pp. 659-662
-
-
Burns, D.W.1
-
23
-
-
0028526888
-
A surface micromachined silicon accelerometer with on-chip detection circuitry
-
Wolfgang Kuehnel and Steven Sherman, “A surface micromachined silicon accelerometer with on-chip detection circuitry”, Sensors and Actuators A45, 1994, pp. 7-16.
-
(1994)
Sensors and Actuators A45
, pp. 7-16
-
-
Kuehnel, W.1
Sherman, S.2
-
24
-
-
0025698131
-
Precision Accelerometers with µg Resolution
-
CSEM
-
F. Rudolf, et al, CSEM, “Precision Accelerometers with µg Resolution”, Sensors and Actuators A 21-23, 1990, pp. 297-302.
-
(1990)
Sensors and Actuators A 21-23
, pp. 297-302
-
-
Rudolf, F.1
-
25
-
-
0025698106
-
An ASIC for High-resolution Capacitive Microaccelerometers
-
CSEM
-
H. Leuthold and F. Rudolf, CSEM, “An ASIC for High-resolution Capacitive Microaccelerometers”, Sensors and Actuators A 21-23, 1990, pp. 278-281.
-
(1990)
Sensors and Actuators A 21-23
, pp. 278-281
-
-
Leuthold, H.1
Rudolf, F.2
-
26
-
-
84902194684
-
Wide dynamic range direct digital accelerometer
-
W. Henrion, Hal Jerman, et al, I. C. Sensors. “Wide dynamic range direct digital accelerometer”, IEEE Hilton Head 1990, pp. 153-157.
-
(1990)
IEEE Hilton Head
, pp. 153-157
-
-
Henrion, W.1
Jerman, H.2
Sensors, I.C.3
-
27
-
-
0012817046
-
Design and test of a precision servoaccelerometer with digital output”
-
CSEM
-
Y. de Coulon, et al, CSEM, “Design and test of a precision servoaccelerometer with digital output” 7th Solid State Sensors and Actuators, 1993, pp. 832-835.
-
(1993)
7th Solid State Sensors and Actuators
, pp. 832-835
-
-
de Coulon, Y.1
-
28
-
-
0025698079
-
Semiconductor Capacitance-type Accelerometer with PWM Electrostatic Servo technique
-
A
-
S. Suzuki and S. Tuchitani, “Semiconductor Capacitance-type Accelerometer with PWM Electrostatic Servo technique” Sensors and Actuators, Vol. A 21-23, 1999, pp. 316-319.
-
(1999)
Sensors and Actuators
, vol.21-23
, pp. 316-319
-
-
Suzuki, S.1
Tuchitani, S.2
-
29
-
-
0024732784
-
An electron tunneling sensor
-
Waltman and W. J. Kaiser, “An electron tunneling sensor” Sensors and Actuators, vol. 19, 1989, 201-210.
-
(1989)
Sensors and Actuators
, vol.19
, pp. 201-210
-
-
Waltman1
Kaiser, W.J.2
-
30
-
-
0028514999
-
Wide-Bandwith Electromechanical Actuators for Tunneling Displacement Transducers
-
September
-
T. W. Kenny, et al. “Wide-Bandwith Electromechanical Actuators for Tunneling Displacement Transducers” J. Microelectromechanical Systems, Vol.3, No.3, September 1994, pp. 97-104.
-
(1994)
J. Microelectromechanical Systems
, vol.3
, Issue.3
, pp. 97-104
-
-
Kenny, T.W.1
-
31
-
-
0029490521
-
A Miniature, High-Sensitive Electron Tunneling Accelerometer
-
Howard K. Rockstadt, T. W. Kenny, et al. “A Miniature, High-Sensitive, Electron Tunneling Accelerometer” Transducers '95, Vol.2, pp. 675-678.
-
Transducers '95
, vol.2
, pp. 675-678
-
-
Rockstadt, H.1
Kenny, T.W.2
-
32
-
-
85010172930
-
Progress in tunnel Sensors
-
J. Grade, et al. “Progress in tunnel Sensors” Preprint Hilton Head 1996.
-
(1996)
Preprint Hilton Head
-
-
Grade, J.1
-
33
-
-
0029426319
-
High-bandwidth feedback control of micromachined tunneling sensors
-
Liu, J. K. Reynolds, A. Partridge, T. W. Kenny, L. M. Miller, J. A. Podosek, H. K. Rockstad, W. J. Kaiser, “High-bandwidth feedback control of micromachined tunneling sensors” Proceedings ASME Dynamic Systems and Control Division, 1995, pp. 1001-1010.
-
(1995)
Proceedings ASME Dynamic Systems and Control Division
, pp. 1001-1010
-
-
Liu, J.K.1
Reynolds, A.2
Partridge, T.W.3
Kenny, L.M.4
Miller, J.A.5
Podosek, H.K.6
Rockstad, W.J.7
|