Theory, modeling and characterization of PZT-on-alumina resonant piezo-layers as acoustic-wave mass sensors

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 182-190

  Ferrari, Vittorio ^a   Marioli, Daniele ^a   Taroni, Andrea ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Acoustic wave sensor; Equivalent circuit model; Mass sensor; Piezoelectric resonator; Thick film sensor

Indexed keywords

ACOUSTIC WAVES; ALUMINA; ELECTRIC IMPEDANCE; EQUIVALENT CIRCUITS; LEAD COMPOUNDS; MATHEMATICAL MODELS; PIEZOELECTRIC MATERIALS; RESONATORS; SUBSTRATES; THICK FILMS;

ACOUSTIC WAVE SENSOR; MASS SENSOR; PIEZOELECTRIC RESONATOR; THICK FILM SENSOR;

SENSORS;

EID: 0035426045     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00561-1     Document Type: Article

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