Influence of pressure and plasma potential on high growth rate microcrystalline silicon grown by VHF PECVD

Materials Research Society Symposium Proceedings

Volumn 862, Issue , 2005, Pages 87-92

  Gordijn, A ^a   Francke, J ^a   Hodakova, L ^b   Rath, J K ^a   Schropp, R E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; ION BOMBARDMENT; PLASMA APPLICATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SOLAR CELLS;

MEAN FREE PATH; PLASMA POTENTIAL; PLASMA POWER;

CRYSTALLINE MATERIALS;

EID: 30644479889     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-862-a10.3     Document Type: Conference Paper

References (18)

1. O. Vetterl, F. Finger, and H. Wagner, Sol. Energ. Mat. Sol. C. 62, 97 (2000).
2. B. Rech, T. Roschek, T. Repmann, J. Müller, R. Schmitz, and W. Appenzeller, Thin Solid Films 427, 157 (2003).
3. K. Yamamoto, A. Nakajima, and Y. Tawada, Solar Energy 77 (6), 939 (2004).
4. A.V. Shah, J. Meier, and U. Graf, Sol. Energ. Mat. Sol. C. 78, 469 (2003).
5. A. Matsuda, J. Non-Cryst. Solids 338-340, 1 (2004).
6. J. Meier, R. Fluckiger, H. Keppner, and A. Shah, Appl. Phys. Lett. 65 (7), 860 (1994).
7. M. Fukawa, S. Suzuk, and A. Matsuda, Sol. Energ. Mat. Sol. C. 66, 217 (2001).
8. Y. Mai, S. Klein, and F. Finger, Appl. Phys. Lett. 85 (14), 2839 (2004).
9. L. Guo, M. Kondo, and A. Matsuda, Jpn. J. Appl. Phys. 37, L1116 (1998).
10. M. Kondo, and A. Matsuda, Curr. Opin. Solid St. M. 6, 445 (2002).
11. J. Müller, B. Rech, J. Springer, and M. Vaněček, Solar Energy 77 (6), 917 (2004).
12. O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schöpe, C. Beneking, and H. Wagner, Thin Solid Films 351, 247 (1999).
13. B. Yan, G. Yue, and C.-S. Jiang, Appl. Phys. Lett. 85 (11), 1955 (2004).
14. M. Vaněček and A. Poruba, Appl. Phys. Lett. 80 (5), 719 (2002).
15. M. Vaněček, A. Poruba, and A. Shah, J. Non-Cryst. Solids 266-269, 519 (2000).
16. A. Matsuda, J. Non-Cryst. Solids 59-60, 767 (1983).
17. M. Kondo, M. Fukawa, and A. Matsuda, J. Non-Cryst. Sol. 266, 84 (2000).
18. E.A.G. Hamers, A. Fontcuberta i Morral, and P. Roca i Cabarrocas, J. Appl. Phys. 88 (6), 3674 (2000).