SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 200, Issue 8, 2006, Pages 2672-2678

The effect of N+-implanted aluminum substrate on the mechanical properties of TiN films

(7) Liu, Youming a Li, Liuhe a,b Xu, Ming a Chen, Qiulong a Hu, Yawei a Cai, Xun a Chu, Paul K c

a SHANGHAI JIAO TONG UNIVERSITY (China)

b University of Aeronautic and Astronautic (China)

c CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Adhesion strength; Modulus; N+ implanted aluminum; Nanohardness; TiN films

Indexed keywords

ADHESION; ALUMINUM; AUGER ELECTRON SPECTROSCOPY; COMPOSITION EFFECTS; FILMS; HARDNESS TESTING; INDENTATION; ION IMPLANTATION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; NITROGEN; SPUTTER DEPOSITION;

ADHESION STRENGTH; NANOINDENTATION; SCRATCH TEST; TITANIUM NITRIDE FILMS;

TITANIUM NITRIDE;

COATING; MECHANICAL PROPERTY; NITROGEN; TITANIUM NITRIDE;

EID: 30644479354 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.12.030 Document Type: Article

Times cited : (9)

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