Luminescence properties of Cu-ion-implanted and annealed ZnO thin films deposited by chemical vapor deposition and pulsed laser deposition

Surface and Interface Analysis

Volumn 38, Issue 1, 2006, Pages 1-5

  Sakaguchi, Isao ^a   Ryoken, Haruki ^a   Nakagawa, Tsubasa ^a   Sato, Yoshiyuki ^b   Haneda, Hajime ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b NTT Advance Technology Corporation   (Japan)

Author keywords

Chemical vapor deposition; Ion implantation; Luminescence; Secondary ion mass spectrometry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COPPER; ION IMPLANTATION; IONS; LASER PULSES; LUMINESCENCE; MAGNESIUM COMPOUNDS; SECONDARY ION MASS SPECTROMETRY; ZINC OXIDE;

CU-ION-IMPLANTED; CVD-ZNO; LUMINESCENCE PROPERTIES; ZNO THIN FILMS;

THIN FILMS;

EID: 30544453821     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2124     Document Type: Article

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