Combinatorial ion implantation techniques application to optical

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 8 A, 2004, Pages 5562-5563

  Sakaguchi, Isao ^a   Hishita, Syunichi ^a   Haneda, Hajime ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Ion Implantation; Optical property; Zinc oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BEAMS; LIGHT EMISSION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SCANNING; THICKNESS CONTROL; THIN FILMS; ZINC OXIDE;

DIGITAL SCANNING SYSTEM; LATERAL RESOLUTION; MOVING MASK SYSTEM; OPTICAL CHARACTERISTICS;

ION IMPLANTATION;

EID: 6344277092     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5562     Document Type: Article

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