Miniaturized SAW motor with 100 MHz driving frequency

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 482-485

  Shigematsu, Takashi ^a   Kurosawa, Minoru Kuribayashi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASSEMBLY; FRICTION; MACHINING; MOTORS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; RAYLEIGH SCATTERING; STATORS; STIFFNESS; SURFACE WAVES; TRANSDUCERS; ULTRASONICS; VIBRATIONS (MECHANICAL);

ELECTROMAGNETIC MOTORS; MINIATURIZATION; SURFACE ACOUSTIC WAVE (SAW) MOTORS; ULTRASONIC MOTORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 3042786126     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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