Simulation of surface acoustic wave motor with spherical slider

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 4, 1999, Pages 929-934

  Morita, Takeshi ^a   Kurosawa, Minoru Kuribajashi ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; FRICTION; LITHIUM NIOBATE; PIEZOELECTRIC TRANSDUCERS; SPEED CONTROL; TIME MEASUREMENT; ULTRASONIC DEVICES; VIBRATION MEASUREMENT;

ELASTIC DEFORMATION; HERTZ CONTACT THEOREM; INTERDIGITAL TRANSDUCER; RAYLEIGH WAVE; SPHERICAL SLIDER; TRANSIENT RESPONSE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0032662929     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.775659     Document Type: Article

References (6)

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3. M. Kurosawa, M. Takahashi, and T. HiguchiElastic contact conditions to optimize friction drive of surface acoustic wave motor, IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, no. 5, Sep. 1998.
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5. H. Hirata and S. UehaRevolution speed characteristics of an ultrasonic motor estimated from the pressure distribution of the rotor, Jpn. J. Appl. Phys., vol. 31, suppl. 31-1, pp. 248-250. 1992.
6. M. Chiba , M. Takahashi, M. Kurosawa, and T. HiguchiEvaluation of a surface acoustic wave motor, in Proc. IEEE Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, 1996, pp. 250-255.