Optimization of slider contact face geometry for surface acoustic wave motor

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 252-255

  Kurosawa, Minoru Kuribayashi ^a   Itoh, Hidenori ^a   Asai, Katsuhiko ^b   Takasaki, Masaya ^c   Higuchi, Toshiro ^c  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b PANASONIC CORPORATION   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FABRICATION; GEOMETRY; MACHINING; MOTORS; OPTIMIZATION; SILICON;

SLIDER CONTACTS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0035007703     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906526     Document Type: Article

References (0)