Artificial neural network modeling of RF MEMS resonators

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 14, Issue 4, 2004, Pages 302-316

  Lee, Yongjae ^a   Park, Yonghwa ^a   Niu, Feng ^b   Bachman, Bonnie ^b   Gupta, K C ^a   Filipovic, Dejan ^a  

^a UCB 450   (United States)

^b MOTOROLA INC   (United States)

Author keywords

Artificial neural networks; Computer aided design; Equivalent circuits; Finite element methods; Microelectromechanical devices

Indexed keywords

BOUNDARY ELEMENTS (BE); ELECTRICAL ANALOGS; FINITE-DIFFERENCE TIME-DOMAIN (FDTD); MECHANICAL ANALOGS;

COMPUTATIONAL COMPLEXITY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROWAVES;

NEURAL NETWORKS;

EID: 3042784371     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/mmce.20017     Document Type: Article

References (21)

1. J.Y. Qian, G.P. Li, and F. De Flavis, A parametric model of low-loss RF MEMS capacitive switches, Asia-Pacific Microwave Conf, Taipei, Taiwan 2001.
2. J.Y. Qian, G.P. Li, and F. De Flavis, A parametric model of MEMS capacitive switch operating at microwave frequencies, IEEE MTT-S Int Microwave Symp 2, 2000.
3. R.H. Krondorfer and T.C. Lommasson, Direct calculation of sensor performance in a FEA model [MEMS] Sensors, Proc IEEE 2 (2002).
4. N. Bushyager, K. Lange, M. Tentzeris, and J. Parapolymerou, Modeling and optimization of RF reconfigurable tuners with computationally efficient time-domain techniques, IEEE MTT-S Int Microwave Symp 2 (2002).
5. E.K. Chan, K. Garikipati, and R.W. Dutton, Comprehensive static characterization of vertical electrostatically actuated polysilicon beams, IEEE Design and Test of Computers 16 (1999), 8-65.
6. L. Rufer, C. Domingues, and S. Mir, Behavioral modeling and simulation of a MEMS-based ultrasonic pulse-echo system, Proc SPIE, Cannes, France, 2002, pp 171-190.
7. X. Lafontan, C.L. Touze, B. Wenk, I. Kolesnik, F. Pressecq, F. Perez, J. Nicot, M. Dardalhon, and S. Rigo. Environmental test bench for reliability studies: Influence of the temperature on RF switches with metallic membranes, Proc SPIE, 4755, pp 624-633, Cannes, France, 2002.
8. F.D. Bannon III, J.R. Clark, and C.T.-C. Nguyen, High-Q microelectromechanical filters, IEEE J Solid-State Circ 35 (2000).
9. Y.H. Park and K.C. Park, Design sensitivity analysis for the performance evaluation of High-Q MEMS resonator, American Institute of Aeronautics and Astronautics, paper AIAA2002-1351, 2002.
10. MATLAB, R13, vers. 6.5, http://www.mathworks.com.
11. J.B. Muldavin and G.M. Rebeiz, High-isolation CPW MEMS switches, Pt 1: Modeling, IEEE Trans Microwave Theory Tech 48 (2000).
12. J.B. Muldavin and G.M. Rebeiz, High-isolation CPW MEMS switches, Pt 2: Design, IEEE Trans Microwave Theory Tech 48 (2000).
13. th Int IEEE Microelectromechanical Syst Conf, Orlando, FL, 1999, pp. 453-458,
14. J.R. Clark, W.T. Hsu, and C. T.-C. Nguyen, Measurement techniques for capacitively transduced VHF-to-UHF micromechanical resonators, Int Conf Solid-State Sensors Actuators, Munich, Germany, 2001, pp.1118-1121.
15. C.T.-C. Nguyen, Transceiver front-end architectures using vibrating micromechanical signal processors, Top Mtg Silicon Monolithic ICs in RF System, Ann Arbor, MI, 2001.
16. H.A.C Tilmans, Equivalent circuit representation of electromechanical transducers: II Distributed-parameter systems, J Micromech 7, (1997), 285-309.
17. T. Veijola, T. Mattila, O. Jaakkola, J. Kiihanmaki, T. Lamminmaki, A.O. Ja, K. Ruokonen, H. Seppa, P. Seppala, and I. Tittonen. Large displacement modeling and simulation of micromechanical electrostatistically driven resonators using the harmonic balance methods, IMS 2000, Boston, MA, 2000, pp. 99-102.
18. M.T. Hagan, H.B. Demuth, and M.H. Beale, Neural network design, PWS Publishing Company, Boston, 1996.
19. C.T.-C. Nguyen, Micromechanical circuits for communication transceivers, Proc BCTM, Minneapolis, Minnesota, 2000, pp.142-149,
20. M.T. Hagan and M. Menhaj, Training feed-forward networks with the Marquardt algorithm, IEEE Trans Neural Networks 5 (1994).
21. Advanced Design System, http://www.agilent.com.