Direct Calculation of Sensor Performance in a FEA Model

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1270-1274

  Krondorfer, Rudolf H ^a   Lommasson, Timothy C ^a  

^a Infineon Technologies SensoNor AS   (Norway)

Author keywords

FEA; MEMS; Modelling; Pressure Sensors; Silicon Diaphragm

Indexed keywords

COMPUTER SOFTWARE; DIAPHRAGMS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SIGNAL PROCESSING; SILICON; THERMAL STRESS; TRANSDUCERS;

PRESSURE SENSORS; SILICON DIAPHRAGM;

MICROSENSORS;

EID: 1542331398     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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