A bi-directional electrothermal electromagnetic actuator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 450-453

  Cao, Andrew ^a   Kim, Jong Baeg ^a   Tsao, Tony ^a   Liwei, Lin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; CHARGED PARTICLES; COMPRESSIVE STRESS; DEGRADATION; ELECTRIC CURRENTS; ELECTROMAGNETISM; HEATING; MAGNETIC FIELDS; MICROMACHINING; NATURAL FREQUENCIES; RELIABILITY;

ACTUATION BEAM; ELECTROMAGNETIC FORCES; ELECTROTHERMAL FORCES; LORENTZ FORCE;

MICROACTUATORS;

EID: 3042783098     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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