Thin film growth using hyperthermal ions: A surface morphology study

Surface Science

Volumn 561, Issue 2-3, 2004, Pages 147-153

  Vanormelingen, K ^a   Degroote, B ^a   Pattyn, H ^a   Vantomme, A ^a  

^a KU LEUVEN   (Belgium)

Author keywords

Ion solid interactions; Scanning tunneling microscopy; Silicides; Surface structure, morphology, roughness, and topography

Indexed keywords

IONS; MOLECULAR BEAM EPITAXY; MONOLAYERS; MORPHOLOGY; SCANNING TUNNELING MICROSCOPY; SURFACE ROUGHNESS;

HYPERTHERMAL IONS; ION ENERGY; ION-SOLID INTERACTIONS; SILICIDES;

THIN FILMS;

EID: 3042700801     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2004.05.117     Document Type: Article

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