Hyperthermal particle enhanced silicon epitaxy

Chemical Physics Letters

Volumn 283, Issue 3-4, 1998, Pages 215-220

  Marton, D ^a   Boyd, K J ^a,b   Rabalais, J W ^a  

^a University of Houston   (United States)

^b UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032488721     PISSN: 00092614     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2614(97)01356-0     Document Type: Article

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