Tip-to-sample distance dependence of an electrostatic force in KFM measurements

Ultramicroscopy

Volumn 100, Issue 3-4, 2004, Pages 287-292

  Takahashi, Takuji ^a   Ono, Shiano ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Beat component; Electric field; Electrostatic force; Tip to sample distance dependence; Two dimensional simulation

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; SCANNING;

ELECTROSTATIC FORCES; TIP SIDEWALL EFFECTS; TIP-TO-SAMPLE DISTANCES;

ELECTROSTATICS;

ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; ELECTRIC FIELD; ELECTRICITY; EVALUATION; SIMULATION; VIBRATION;

EID: 3042511595     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2004.01.017     Document Type: Conference Paper

References (8)

1. Nonnenmacher M., O'Boyle M.P., Wickramasinghe H.K. Appl. Phys. Lett. 58:1991;2921
2. Usunami T., Arakawa M., Kishimoto S., Mizutani T., Kawada T. Jpn. J. Appl. Phys. 37:1998;1522
3. Hayashi K., Saito N., Sugimura H., Takai O., Nakagiri N. Ultramicroscopy. 91:2002;151
4. Ono S., Takeuchi M., Noda T., Takahashi T. Jpn. J. Appl. Phys. 42:2003;4869
5. Torii S., Bando K., Shim B., Maehashi K., Nakashima H. Jpn. J. Appl. Phys. 38:1999;4673
6. Ono S., Takeuchi M., Takahashi T. Ultramicroscopy. 91:2002;127
7. Adachi S. J. Appl. Phys. 58:1985;R1
8. S.M. Sze, Physics of Semiconductor Devices, Wiley, New York, 1969, pp. 366.