Raman scattering characterization on SiC

Microelectronic Engineering

Volumn 83, Issue 1 SPEC. ISS., 2006, Pages 126-129

  Harima, Hiroshi ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Interface; Ion implantation; Phonon; Raman scattering; SiC; UV laser

Indexed keywords

ION IMPLANTATION; PHONONS; RAMAN SCATTERING; SOFTWARE PROTOTYPING; ULTRAVIOLET RADIATION;

INTERFACE; UV LASER;

SILICON CARBIDE;

EID: 30344460651     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.10.037     Document Type: Conference Paper

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