Fabrication of concave micro lens array using laser patterning and isotropic etching

International Journal of Machine Tools and Manufacture

Volumn 46, Issue 5, 2006, Pages 552-558

  Lim, C S ^a   Hong, M H ^a   Kumar, A Senthil ^a   Rahman, M ^a   Liu, X D ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Isotropic etching; Laser patterning; Lens sag; Micro lens arrays

Indexed keywords

ETCHING; GLASS; ISOTHERMS; LASER ABLATION; LASER APPLICATIONS; MORPHOLOGY; SUBSTRATES;

ISOTROPIC ETCHING; LASER PATTERNING; LENS SAG; MICRO LENS ARRAY;

ARRAYS;

EID: 30344446012     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2005.06.004     Document Type: Article

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